ANSYS -MEMS:
Files created by the 3D Modeler can be read into the ANSYS program. Once the
3D model is entered, it can be analyzed using any ANSYS finite element module.
In this tutorial, you will perform a simple structural analysis of the spring
mechanism on a lateral comb resonator. You will apply a small force on one end
of the device model. ANSYS will compute the resulting deflection. You will then
calculate the spring constant using Hooke’s law.